薄膜与小尺度材料及力学性能研究组

^aSchool of Electronic & Information Engineering, Tianjin University, Tianjin 300072, China

Abstract

Porous silicon (PS) was prepared using the electrochemical corrosion method. Thermal oxidation of the as-prepared PS samples was performed at different temperatures for tuning their mechanical properties. The mechanical properties of as-prepared and oxidized PS were thoroughly investigated by depth-sensing nanoindentation techniques with the continuous stiffness measurements option. The morphology of as-prepared and oxidized PS was characterized by field emission scanning electron microscope and the effect of observed microstructure changes on the mechanical properties was discussed. It is shown that the hardness and Young's elastic modulus of as-prepared PS exhibit a strong dependence on the preparing conditions and decrease with increasing current density. In particular, the mechanical properties of oxidized PS are improved greatly compared with that of as-prepared ones and increase with increasing thermal oxidation temperature. The mechanism responsible for the mechanical property enhancement is possibly the formation of SiO₂ cladding layers encapsulating on the inner surface of the incompact sponge PS to decrease the porosity and strengthen the interconnected microstructure.

Keywords: Porous silicon; Hardness; Young's elastic modulus; Nanoindentation; thermal oxidation